| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To enhance detection sensitivity of a flow sensor while suppressing temperature increase of a heat sensitive resistive element. <P>SOLUTION: A cylinder 30 forming a passage in which gas flows on substrates 20a and 20b supporting the heat sensitive resistive elements 24 and 26 is provided, and a heater 32 of a resistance wire is wound on the outer face. When upstream gas D passes the upstream side heat sensitive resistive element 24 by generation of gas flow to flow into a cylinder 30 of the heater and gas C in the cylinder 30 passes the downstream side heat sensitive resistive element 26, change of the potential difference due to gas flow generation between the upstream side and downstream side heat sensitive resistive elements 24 and 26 exceeds that of the conventional flow sensor, and the output becomes large. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
