| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and device for detecting displacement of an object to be measured capable of highly sensitive detection in comparatively compact constitution. SOLUTION: The method and device for detecting the displacement detect the displacement of the object to be measured of a cantilever 103 or the like by using an angle change of detection light emitted from the object to be measured, and amplify change accompanying angle change of incident detection light of a propagation angle for an incident face of the detection light incident on the crystal to detect the displacement of the object to be measured by using a deflection element consisting of a crystal periodically changing a refractive index. COPYRIGHT: (C)2005,JPO&NCIPI
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