MICROLENS, ITS MANUFACTURING METHOD, OPTICAL MODULE INTEGRATING MICROLENS, AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a microlens which collects the light on a substrate integrating optical elements vertically and horizontally, and also to provide its manufacturing method, an optical module integrating the microlens, and its manufacturing method. SOLUTION: These methods include stages of: forming a thin film 52 of a microlens constituting substance on a substrate 51, forming a photo register pattern 53 on the thin film 52, forming a thin film constituting substance 54 though an etching process using the photo register pattern 53, and forming the microlens by reflow by thermal processing of the thin film constituting structure 54. COPYRIGHT: (C)2005,JPO&NCIPI