发明名称 |
Ultrashort-pulse laser-working method and apparatus and structural bodies produced by using the same |
摘要 |
A laser-working method is disclosed, which includes the steps of splitting a single pulse laser beam having a time width of not more than 500 picoseconds into plural pulse laser beams; subjecting said plural pulse laser beams to time delaying, and adjusting a working surface-irradiating shape, an intensity distribution and a working surface-irradiating position of each of the plural pulse laser beams; working a target object to be irradiated, while the respective working surface-irradiating shapes of said plural laser beams are partially or entirely spatially overlapped with each other or one another; and setting to a time interval of from a pulse width to 1 nanosecond a time period during which each of the pulse laser beams is irradiated.
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申请公布号 |
US2005018996(A1) |
申请公布日期 |
2005.01.27 |
申请号 |
US20040867681 |
申请日期 |
2004.06.16 |
申请人 |
SEO MANABU;YAMADA YASUFUMI |
发明人 |
SEO MANABU;YAMADA YASUFUMI |
分类号 |
B23K26/06;B23K26/067;(IPC1-7):G02B6/00 |
主分类号 |
B23K26/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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