| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric actuator of excellent displacement characteristics and reliability in jointing with stainless steel, and an ink jet recording head comprising the same. <P>SOLUTION: A vibrating plate 20 has a plurality of ceramics layers 13, 15, and 17 laminated downward in such order as starting with the one of the smallest thermal expansion factor, with internal electrodes 14 and 16 laminated among them. An internal electrode 12, a piezoelectric ceramic layer 11, and a surface electrode 18 are laminated in this order on the vibrating plate, constituting a piezoelectric actuator 19. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
