发明名称 SILICA GLASS CONTAINING TIO2 AND ITS MANUFACTURING METHOD
摘要 <p><P>PROBLEM TO BE SOLVED: To provide silica glass containing TiO<SB>2</SB>having a thermal expansion coefficient of about 0 in a wide range of temperatures. <P>SOLUTION: This method for manufacturing silica glass containing TiO<SB>2</SB>comprises a process to form a porous glass, a process to obtain a transparent glass body, a process to obtain a shaped glass body, and a process for annealing. The silica glass containing TiO<SB>2</SB>has a virtual temperature of≤1,200°C, an OH group concentration of≤600 ppm, and a thermal expansion coefficient at 0-100°C of 0±200 ppb/°C. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p>
申请公布号 JP2005022954(A) 申请公布日期 2005.01.27
申请号 JP20040065275 申请日期 2004.03.09
申请人 ASAHI GLASS CO LTD 发明人 IWAHASHI KOSHIN;KOIKE AKIO
分类号 C03B20/00;C03C3/06;C03C3/076;C03C4/00;H01L21/027;(IPC1-7):C03C3/06 主分类号 C03B20/00
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