摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide silica glass containing TiO<SB>2</SB>having a thermal expansion coefficient of about 0 in a wide range of temperatures. <P>SOLUTION: This method for manufacturing silica glass containing TiO<SB>2</SB>comprises a process to form a porous glass, a process to obtain a transparent glass body, a process to obtain a shaped glass body, and a process for annealing. The silica glass containing TiO<SB>2</SB>has a virtual temperature of≤1,200°C, an OH group concentration of≤600 ppm, and a thermal expansion coefficient at 0-100°C of 0±200 ppb/°C. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |