发明名称 GRINDING DEVICE AND GRINDING METHOD
摘要 PROBLEM TO BE SOLVED: To improve production efficiency by eliminating the necessity of always monitoring the surface position of a workpiece by a sensor during machining to reduce the damage of the workpiece caused by the sensor. SOLUTION: Each machining time, the sensor 17 for measuring the surface position of the workpiece 12 is detached from the workpiece 12, and in this state, a grinding wheel 13 is fed to machine the workpiece 12 (Fig. B). During machining, the surface position of the workpiece 12 is estimated at real time using the feed position of the grinding wheel 13, the grinding wheel wear quantity and machine deformation quantity generated up to the preceding machining, the estimate of the grinding wheel wear quantity generated this time, and the like, and grinding wheel feed control is performed based on the estimate. After machining is completed, the sensor 17 is set to the workpiece 12 to measure the surface position of the workpiece 12 at the completion of machining. The measured value is used for the machining control to be performed next machining time. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005021998(A) 申请公布日期 2005.01.27
申请号 JP20030186854 申请日期 2003.06.30
申请人 KOMATSU MACHINERY CORP;KOMATSU LTD;KOMATSU ELECTRONIC METALS CO LTD;WAIDA SEISAKUSHO:KK 发明人 SHIYAKUSHI TETSUO;KOBIKI YASUHIRO;MASUTANI FUMIO;HASEGAWA SHINJI
分类号 B24B49/02;B24B7/22;H01L21/304;(IPC1-7):B24B49/02 主分类号 B24B49/02
代理机构 代理人
主权项
地址