发明名称 MULTILAYER OPTICAL ELEMENT AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a multilayer optical element which is easy to handle. SOLUTION: A multilayer optical element 1 is formed by alternately stacking silicon oxide thin films and niobium pentoxide thin films to form a multilayer structure consisting usually of 50 to 100 layers and has a total thickness of 20 to 30μm. The multilayer optical element 1 is divided into a first part 2 which functions as an optical element and a second part 2 for handling and, between the first part 2 and the second part 3, a difference in level shown in the figure is provided. Accordingly, when the multilayer optical element 1 is put on a working bench in the state that the second part 3 is raised, this part can be easily pinched with tweezers etc. and, therefore, the handling is facilitated. Further, by differentiating the dimensions of the first part 2 and the second part 3, both of the parts can be discriminated and, therefore, it can be prevented that the first part 2 functioning as an optical element is pinched with the tweezers and is damaged. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005024939(A) 申请公布日期 2005.01.27
申请号 JP20030190828 申请日期 2003.07.03
申请人 NIKON CORP 发明人 SUZUKI MASASHI
分类号 G02B5/28;(IPC1-7):G02B5/28 主分类号 G02B5/28
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