| 摘要 |
PROBLEM TO BE SOLVED: To provide a method, a system and an optical element for simultaneously measuring the surface shape (dynamic geometry) in nanometer order, during a motion of a fine structure dynamic object such as micro electro-mechanical system (MEMS), and the position (dynamic position) in the direction nearly perpendicular to the surface. SOLUTION: When an interference fringe image photographed with a CCD camera 16 and an image of only a reference light are analyzed, a complex amplitude U<SB>0</SB>of object reflection light at the CCD camera 16 position is obtained, then a complex amplitude U<SB>z</SB>of the object reflection light at a plurality of positions in the optical axis direction of the object reflection light is obtained by calculating the Fresnel diffraction of U<SB>0</SB>and the surface shape of the object and the position in the direction nearly perpendicular to the object surface are obtained from U<SB>z</SB>. Then, based on the detection value of the image in a focused state in the amplitude data of the object reflection light obtained from U<SB>z</SB>, texture in the object amplitude image is recognized and a specific region in the recognized texture is selected. COPYRIGHT: (C)2005,JPO&NCIPI
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