Microlithographic projection illumination system projection objective has gray filter with locally varying gray value for compensating polarization distribution disturbance caused by optical element

摘要

The projection objective has a first optical element (L2) that produces a disturbance of the polarization distribution of the projection light (22) and a second polarizing optical element (28) that is downstream of the first in the propagation direction. The projection objective (10) has a gray filter (32) with a locally varying gray value for compensating the polarization distribution disturbance.