发明名称 System and method for dispensing a resin between substrates of a bonded storage disk
摘要 A system for dispensing resin between substrates, comprises a top substrate device (512) for holding a top substrate so that any radial cross section of the top substrate has a continuous concave-up shape extending from a center portion of the top substrate to its outer diameter wherein the magnitude of the slope of the cross section continuously increases along an outwardly radial direction of the top substrate, a bottom substrate device (508) for holding a bottom substrate so that any radial cross section of the bottom substrate has a continuous concave-down shape extending from a center portion of the bottom substrate to its outer diameter wherein the magnitude of the slope of the cross section continuously increases along an outwardly radial direction of the top substrate, and a resin dispensing device (514) for dispensing resin between the top and bottom substrate. <IMAGE>
申请公布号 EP1164004(A3) 申请公布日期 2005.01.26
申请号 EP20010115837 申请日期 1998.11.12
申请人 STEAG HAMATECH, INC. 发明人 ROSSIGNOL, BRIAN C.;PAULUS, JOSEPH W.;LEBLANC, ARTHUR W. III;RAMANATHAN, ELANGOVAN
分类号 B29C65/54;B32B7/12;B32B37/00;B32B37/12;B32B38/18;G11B7/26 主分类号 B29C65/54
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