WAFER HOLDER OF SEMICONDUCTOR FABRICATING EQUIPMENT TO PREVENT WAFER HELD BY WAFER HOLDER FROM BEING BROKEN

摘要

PURPOSE: A wafer holder of semiconductor fabricating equipment is provided to prevent a wafer held by a wafer holder from being broken by uniformly distributing the pressure applied to the wafer. CONSTITUTION: An index plate rotates as a process is carried out. A plurality of process chambers are radially disposed with respect to the center, installed in one side of the index plate. A wafer holder(20) holds a wafer, having a one-to-one correspondence with the plurality of process chambers and installed in a surface of the index plate. A heater table selectively comes in contact with the wafer holder to heat the wafer, installed in the other side of the index plate to have a one-to-one correspondence with the wafer holder. The wafer holder includes a housing(21), a base substrate(29), an elastic unit and a wafer fixing roller(30). An insertion hole of a predetermined size is formed in the center of the housing to load/unload the wafer. The wafer is placed on the base substrate coupled to a side of the housing. The elastic unit interconnects the base substrate and the housing so that the base substrate is elastically coupled to the housing. The wafer fixing roller selectively fixes the wafer placed on the base substrate, mounted on the base substrate.