| 摘要 |
PURPOSE: A method for manufacturing a monolithic bubble ink jet print head is provided to uniformly manufacture the bubble ink jet print head through a monolithic manner, and to precisely align a substrate and a nozzle plate while increasing productivity and yield rate. CONSTITUTION: A method for manufacturing a monolithic bubble ink jet print head includes the steps of forming a heater and a protective layer at an upper surface of a substrate in order to heat ink, forming a chamber plate(20) at an upper surface of the substrate(1), forming a sacrificial layer photoresist at a predetermined position, in which a flow path of the chamber plate is formed, forming a nozzle plate(60) having a nozzle at an upper surface of the chamber plate, exposing the nozzle plate(60) by using a first photo mask, re-exposing the nozzle plate through the first photo mask by using a second photo mask smaller than the first photo mask, developing a first nozzle(71) using the first photo mask and a second nozzle(72) using the second photo mask, forming a hole by etching a lower surface of the substrate(1), and removing the sacrificial layer photoresist.
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