| 摘要 |
PROBLEM TO BE SOLVED: To easily and inexpensively manufacture a container which can stably be used by forming the structure of the container so as to have a distribution of the treansmissivity with respect to light (IR(infrared light)) of specified wavelengths, such that the transmissivity changes in the direction of height of the container, in a pyrolytic boron nitride(PBN) container used as a molecular beam source container for molecular beam epitaxy. SOLUTION: In this manufacture, the structure of the PBN container is formed so as to have a distribution of the transmissivity with respect to light of 2,600 to 6,500cm<-1> wave number, such that the IR-transmissivity changes in the direction of height of the container, that is, the transmssivity is stepwise and gradually reduced or increased in the direction from the bottom side toward the opening of the container. At this time, as the method for providing the container with this transmissivity distribution, any one of the following three methods can be used, namely: (1) changing the density of PBN to change the light absorption coefficient; (2) changing roughness of the outer surface of the PBN container to change the amount of scattered light; and (3) doping PBN with an element so as to change the thickness, area and dopant concn. of the doped layer. |
