SUBSTRATE CARRIER DEVICE FOR SLANTING THE SUBSTRATE WITH FLUID SPRAYING ELEMENT

摘要

PURPOSE: A substrate carrier device is provided to convert a substrate to a slant posture by spraying fluid with a predetermined pressure via a spraying nozzle of a fluid spraying element of a slant part, thereby preventing the damage of the substrate by physical contact. CONSTITUTION: A substrate carrier device includes a loading part(2) to secure a substrate and moving to a chemical liquid processing area, and a slant part(4) mounted at a position corresponding to a moving direction of the loading part at a bath(D) of the chemical liquid processing area. The slant part includes a second frame(8), a conveying part(10) mounted to the second frame to move the substrate, and a fluid spraying element(12) for spraying a fluid to the substrate loaded to the conveying part for converting the substrate to a slant posture. The slant part helps the substrate to be surface-processed in the slant conditions by using the fluid spraying.