发明名称 Shock protectors for micro-mechanical systems
摘要 The present invention is directed towards shock protectors for a pedestal suspended over a lower surface by a plurality of gimbal springs. Each gimbal spring is connected to a linkage arm that attaches to an actuator. A stop located below the bottom of the pedestal prevents the gimbal springs and/or other structures from impacting the lower surface. In addition, the stop prevents excessively high strain in the gimbal springs. A shock absorber extending from at least one linkage arm serves a similar purpose when the pedestal is tilted, rather than simply displaced.
申请公布号 US6846088(B2) 申请公布日期 2005.01.25
申请号 US20030726098 申请日期 2003.12.01
申请人 INTEL CORPORATION 发明人 KWON HAESUNG
分类号 B81B3/00;B81B7/00;G02B26/08;(IPC1-7):G02B7/182 主分类号 B81B3/00
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