SUBSTRATE CARRYING DEVICE FOR MOVING SUBSTRATES BY SUPPORTING RAILS AND VARIABLE SUPPORTING ELEMENTS OF SLANT CONVEYING PART

摘要

PURPOSE: A substrate carrying device is provided to remove any time delay in the conversion of a substrate for realizing continuous processing of the substrate by using supporting rails and variable supporting elements but also guide elements. CONSTITUTION: A substrate carrying device includes a slant conveying part(4) for conveying a substrate supplied from a loading part and carrying out surface-processing for the substrate in posture-converted state. The slant conveying part includes supporting rails(16) movable along a power transmission element(14) and supporting and conveying the substrate. Variable supporting elements(18) support and convey the substrate supported by the supporting rails to be converted in horizontal or slant posture. A guide element(20) helps the variable supporting elements to convert the substrate horizontally or slantingly.