发明名称 |
Heat treatment apparatus and controller for heat treatment apparatus and control method for heat treatment apparatus |
摘要 |
Temperature control is made without the risk of contaminating object-to-be-processed and with high accuracy. Temperatures are metered out of contact with the objects-to-be-processed, and based on a metered result, estimated temperatures of the objects-to-be-processed are computed. Furthermore, estimation errors of the estimated temperatures are computed to correct the estimated temperatures. Based on a temperature recipe stating relationships between set temperatures and times and the corrected estimated temperatures, a heater is controlled.
|
申请公布号 |
US6847015(B2) |
申请公布日期 |
2005.01.25 |
申请号 |
US20010963381 |
申请日期 |
2001.09.27 |
申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
WANG WENLING;SAKAMOTO KOICHI;PARK YOUNGCHUL;SUZUKI FUJIO;SHAH SUNIL;PANDEY PRADEEP |
分类号 |
C23C16/46;C23C16/52;C30B25/16;C30B31/18;F27B5/18;F27D19/00;G05D23/19;H01L21/205;H01L21/22;H01L21/66;H05B1/02;(IPC1-7):H05B3/02 |
主分类号 |
C23C16/46 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|