Method of manufacturing a liquid crystal display device with a multi-layer interlayer insulator

摘要

A method of manufacturing a liquid crystal display (LCD) device and a novel LCD device structure are disclosed. In accordance with the preferred embodiment of the present invention, a photo-sensitive layer is formed over a substrate, followed by the formation of a photo-insensitive layer over the photo-sensitive layer. Then, a portion of the photo-sensitive layer is exposed via a photomask to a radiation source. Next, the portion of the photosensitive layer is contacted with a developing solution. At this time, the portion of the photo-sensitive layer is dissolved and the portion of the photo-insensitive layer overlying the portion of the photo-sensitive layer is removed concurrently. The present invention simplifies the LCD fabrication while decreasing the capacitance between a pixel electrode and bus lines.