发明名称 |
Interferometer using integrated imaging array and high-density phase-shifting array |
摘要 |
An integrated imaging element for an interferometer generates at least one interference image that includes multiple interference portions with different relative phase shifts interleaved in a pattern having a high spatial frequency in the image. The interleaved pattern is at least partially determined by the pattern of a high density relative retarder array used in the integrated imaging element. In various embodiments, the multiple interference portions are interleaved in a checkerboard-like pattern across the entire surface of a detector device. As a result, various non-common mode errors present in various interferometers that generate separate non-interleaved images for each relative phase are reduced or eliminated.
|
申请公布号 |
US6847457(B2) |
申请公布日期 |
2005.01.25 |
申请号 |
US20020282110 |
申请日期 |
2002.10.29 |
申请人 |
MITUTOYO CORPORATION |
发明人 |
TOBIASON JOSEPH D.;ATHERTON KIM W. |
分类号 |
G01B9/02;(IPC1-7):G01B9/02 |
主分类号 |
G01B9/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|