Angular velocity sensor

摘要

An angular velocity sensor includes a substrate; an impact damping mechanism disposed on the substrate for damping an impact applied to the substrate; an oscillator supported to the inside of the impact damping mechanism displaceable in two directions parallel to the substrate and orthogonal to each other by using an oscillator support beam; oscillation-generating means for oscillating the oscillator in an oscillating direction; and angular-velocity detecting means for detecting a displacement of the oscillator as an angular velocity when the oscillator is displaced in a detecting direction orthogonal to the oscillating direction. The impact damping mechanism damps an impact along at least one direction of the oscillating direction and the detecting direction so as to prevent the impact from being transferred to the oscillator from the substrate.