发明名称 |
Electrostatic chuck for preventing an arc |
摘要 |
An electrostatic chuck includes: a metal plate; a dielectric layer on the metal plate, the dielectric layer and the metal plate having a lift pin hole and an injection hole of a cooling gas; a lift pin moving up-and-down through the lift pin hole; first protection insulator on an inner surface of the lift pin hole; and second protection insulator on an inner surface of the injection hole.
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申请公布号 |
US6847516(B2) |
申请公布日期 |
2005.01.25 |
申请号 |
US20020234695 |
申请日期 |
2002.09.04 |
申请人 |
JUSUNG ENGINEERING CO., LTD. |
发明人 |
KWON GI-CHUNG;BYUN HONG-SIK;LEE SUNG-WEON;KIM HONG-SEUB;HAN SUN-SEOK;KO BU-JIN;KIM JOUNG-SIK |
分类号 |
H01L21/683;(IPC1-7):H01T23/00 |
主分类号 |
H01L21/683 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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