| 发明名称 |
Lighted cassette alignment fixture |
| 摘要 |
Disclosed is a lighted wafer cassette for use in semiconductor wafer processing. Also disclosed are systems and methods employing a wafer cassette lighted with one or more affixed light sources for facilitating cassette alignment with standard semiconductor processing apparatus.
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| 申请公布号 |
US6846095(B2) |
申请公布日期 |
2005.01.25 |
| 申请号 |
US20020199262 |
申请日期 |
2002.07.19 |
| 申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
MCCLANAHAN ADOLPHUS E.;COLEMAN, JR. L. C. |
| 分类号 |
H01L21/673;H01L21/68;(IPC1-7):F21V33/00 |
主分类号 |
H01L21/673 |
| 代理机构 |
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代理人 |
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| 地址 |
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