Fremgangsm琣de til fremstilling af gennemg琣ende hul og anvendelse af den n穉vnte fremgangsm琣de til fremstilling af et siliciumsubstrat, der har et gennemg琣ende hul, og en anordning, der anvender et s琣dant substrat, fremgangsm琣de til fremstilling,申请号DK19970119648T-传众专利搜索

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发明名称	Fremgangsm琣de til fremstilling af gennemg琣ende hul og anvendelse af den n穉vnte fremgangsm琣de til fremstilling af et siliciumsubstrat, der har et gennemg琣ende hul, og en anordning, der anvender et s琣dant substrat, fremgangsm琣de til fremstilling
摘要
申请公布号	DK841167T3	申请公布日期	2005.01.24
申请号	DK19970119648T	申请日期	1997.11.10
申请人		发明人
分类号		主分类号
代理机构		代理人
主权项
地址

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