| 摘要 |
PURPOSE: A vertical type furnace is provided which prevents thermal damage of automatic sensing part by cutting off high temperature transferred through opened lower opening of process tube. CONSTITUTION: The vertical type furnace(200) comprises a vertical type process tube(11) having lower opening(12); a heater(13) which is installed on a side surface part of the process tube and heats the process tube to a certain temperature; an automatic shutter for opening and closing the lower opening; an automatic shutter sensing part(20) for sensing whether the automatic shutter is opened or not; and a protection cover(30) installed at a front part of the automatic shutter sensing part directed to the lower opening to protect the automatic shutter sensing part from damage by heat from the lower opening, wherein the protection cover is formed in a vertical partition so that the automatic shutter sensing part is not exposed to the lower opening at all.
|
