POWER SUPPLY DEVICE OF SEMICONDUCTOR TRANSFERRING APPARATUS FOR REDUCING FATIGUE OF POWER SUPPLY LINES

摘要

PURPOSE: A power supply device of semiconductor transferring apparatus is provided to reduce fatigue of power supply lines by setting the number of the power supply units corresponding to the number of work areas of the semiconductor transferring unit. CONSTITUTION: A semiconductor transferring unit(10) transfers semi-finished semiconductors or finished semiconductors to a corresponding semiconductor fabrication apparatus or a loading/unloading part. A plurality of power supply units(30,31) are used for supplying necessary power for loading/unloading the semi-finished semiconductors or the finished semiconductors. A driving unit(20) transfers the semiconductor transferring unit to each work area to perform a loading/unloading process. The number of the power supply units corresponds to the number of work areas of the semiconductor transferring unit.