ARTICULATED ROBOT FOR TRANSFERRING SUBSTRATE SUCH AS SEMICONDUCTOR WAFER BY MOVING IN NARROW OPERATIONAL RANGE AND TURNING WITH FIRST ARM, SECOND ARM AND THIRD ARM

摘要

PURPOSE: An articulated robot is provided to transfer the semiconductor wafer easily and to decrease the size of the housing by operating the articulated robot in the limited space, and to improve the convenience of the articulated robot by adjusting the position and the pose of the end effecter. CONSTITUTION: An articulated robot is composed of a base(23) having a first pivot and rotating around the first pivot, a first arm(24) having a base end connected to the base and a front end including a second pivot arranged in parallel with the first pivot, a second arm(25) having a base end connected to the front end of the first arm and a front end including a third pivot arranged in parallel with the first pivot, and turning around the second pivot, a third arm(26) having a base end connected to the front end of the second arm and rotating around the third pivot, an interlocking unit reversing the third arm around the third pivot two times as large as the turning angle of the second arm rotating around the second pivot by interlocking the second and third arms, a base driving unit turning the base around the first pivot, and an arm driving unit turning the second arm around the second pivot. The distance between the pivots of the first and second arms is equal to the distance between the pivots of the second and third arms.