发明名称 |
DEVICE FOR THE POLARIZATION-SPECIFIC EXAMINATION OF AN OPTICAL SYSTEM |
摘要 |
A device for polarization-specific examination of an optical system having a detector part that has polarization detector means for recording the exit state of polarization of radiation emerging from the optical system. Also, an associated optical imaging system, and a calibration method for the device. The device includes a polarization detector with a polarizing grating structure. Provided as an alternative is a device for snapshot polarimetry having a birefringent element and downstream polarizer element that adequately polarizes nonquasi-parallel radiation. The device may be used for determining the influence on the state of polarization of UV radiation by a microlithographic projection objective. |
申请公布号 |
AU2003304304(A1) |
申请公布日期 |
2005.01.21 |
申请号 |
AU20030304304 |
申请日期 |
2003.07.05 |
申请人 |
CARL ZEISS SMT AG |
发明人 |
MARKUS MENGEL;ULRICH WEGMANN |
分类号 |
G01J4/04;G01M11/00;G01M11/02;G01N21/21;G02B5/18;G02B5/30;G02B27/44;G03F7/20;H01L21/027;(IPC1-7):G03F7/20;G01J4/00 |
主分类号 |
G01J4/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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