POLISHING PAD PREVENTING FLOWING OUT OF SLURRY FROM POLISHING PAD BY CHANGING GROOVE CONFIGURATION

摘要

PURPOSE: A polishing pad is provided to prevent flowing out of a slurry(polishing agent) from polishing pad by changing configuration of a groove. CONSTITUTION: A plurality of helix-shaped grooves(11) having a predetermined width and depth extend from the center to the peripheral on a polishing pad(10). The plurality of grooves have a repeated tooth-shaped configuration(A). The plurality of helix-shaped grooves are formed in the direction for the centrifugal force to be applied to a slurry. The plurality of grooves have a width of 1mm and a depth of more than o.5mm.