发明名称 METHOD FOR PREVENTING EXFOLIATION AND OXIDATION OF COATING LAYER BY FORMING BUFFER LAYER BETWEEN MATRIX AND TITANIUM NITRIDE COATING LAYER
摘要 PURPOSE: To provide a method for forming a buffer layer between a matrix of cutting tools and a titanium nitride coating layer when coating titanium nitride that is a rigid material on the surface of the matrix to obtain excellent hardness and wear resistance of the cutting tools. CONSTITUTION: The method for coating titanium nitride on a matrix of cutting tools comprises a step of forming plasma by injecting an inert gas into a chamber in which the matrix(200) is contained, and which is maintained under the vacuum condition; a step of injecting nitrogen gas into the chamber and impressing a negative bias voltage to the matrix so that nitrogen ions are injected onto the surface of the matrix; a step of forming titanium ions by supplying a power source to a titanium target installed in the chamber; a step of forming a titanium nitride-based buffer layer(202) on the surface of the nitrogen ion injected matrix by adjusting an injection amount of nitrogen gas injected into the chamber; and a step of forming a titanium nitride(TiN) coating layer(203) on the upper surface of the buffer layer by increasing the injection amount of the nitrogen gas.
申请公布号 KR20050007953(A) 申请公布日期 2005.01.21
申请号 KR20030047596 申请日期 2003.07.12
申请人 DOOSAN HEAVY INDUSTRIES & CONSTRUCTION CO., LTD. 发明人 KIM, DAE JOONG
分类号 C23C14/34;(IPC1-7):C23C14/34 主分类号 C23C14/34
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