发明名称 |
METHOD FOR PREVENTING EXFOLIATION AND OXIDATION OF COATING LAYER BY FORMING BUFFER LAYER BETWEEN MATRIX AND TITANIUM NITRIDE COATING LAYER |
摘要 |
PURPOSE: To provide a method for forming a buffer layer between a matrix of cutting tools and a titanium nitride coating layer when coating titanium nitride that is a rigid material on the surface of the matrix to obtain excellent hardness and wear resistance of the cutting tools. CONSTITUTION: The method for coating titanium nitride on a matrix of cutting tools comprises a step of forming plasma by injecting an inert gas into a chamber in which the matrix(200) is contained, and which is maintained under the vacuum condition; a step of injecting nitrogen gas into the chamber and impressing a negative bias voltage to the matrix so that nitrogen ions are injected onto the surface of the matrix; a step of forming titanium ions by supplying a power source to a titanium target installed in the chamber; a step of forming a titanium nitride-based buffer layer(202) on the surface of the nitrogen ion injected matrix by adjusting an injection amount of nitrogen gas injected into the chamber; and a step of forming a titanium nitride(TiN) coating layer(203) on the upper surface of the buffer layer by increasing the injection amount of the nitrogen gas.
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申请公布号 |
KR20050007953(A) |
申请公布日期 |
2005.01.21 |
申请号 |
KR20030047596 |
申请日期 |
2003.07.12 |
申请人 |
DOOSAN HEAVY INDUSTRIES & CONSTRUCTION CO., LTD. |
发明人 |
KIM, DAE JOONG |
分类号 |
C23C14/34;(IPC1-7):C23C14/34 |
主分类号 |
C23C14/34 |
代理机构 |
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主权项 |
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地址 |
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