TRANSLATIONAL AND ROTATIONAL MOTION STAGE OBTAINING PRECISE OPERATION ACCORDING TO AMPLIFIED OR DIMINISHED MOTION USING BRIDGE MECHANISM

摘要

PURPOSE: A translational and rotational motion stage is provided to obtain the precise operation according to the amplified or diminished motion using a bridge mechanism. CONSTITUTION: A plurality of moving parts(2) having a leaf spring guide(5) are symmetrically formed in a main body(1). A piezo-electric element(10) connects a fixed part(3) of the main body with the each moving part. A plurality of bridge mechanisms(20) have an end part of each side and a flat part bent toward the end part. A flat plate(30) is attached to the center point formed by crossing of center lines of a plurality of flat parts.