| 摘要 |
PROBLEM TO BE SOLVED: To provide a three-dimensional shape measuring instrument for preventing the weight change in an object to be measured from affecting measurement accuracy. SOLUTION: In the three-dimensional shape measuring instrument, a feeler is brought into contact with the surface of an object to be measured fixed onto a measuring base, the feeler is moved along the surface of the object to be measured, and the distance between each reference mirror for forming the position of the feeler to be on a vertical surface in the directions of X, Y, and X axes and the feeler is measured, thus measuring the surface shape of the object to be measured. In the three-dimensional shape measuring instrument, a frame for supporting the reference mirror and the measuring base for supporting the object to be measured are not connected in terms of structure but are supported independently from an installation building floor area. COPYRIGHT: (C)2005,JPO&NCIPI
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