| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor that can identify whether a product is manufactured by other companies or own companies, and can also identify production management information, such as lots and dates of manufacturing. SOLUTION: In the pressure sensor, a sensor region 31, where a sensor section 4 and a breather section 5 are arranged into a matrix form, is present on a substrate 1. A plurality of first wires 2 extended in the column direction and a plurality of second wires 3 extended in the row direction are formed into a matrix form at the sensor region 31, the first wires 2 supply a signal from a scanning circuit section 6 to each sensor section 4, and the second wires 3 detect a signal from each sensor section 4 for supplying to a sensitive circuit section 7. The scanning circuit section 6 and the sensitive circuit section 7 are arranged along two adjacent sides of the sensor region 31 on the substrate 1, and a distinguishing mark 35 for identifying the pressure sensor is attached to a region 34 between the scanning circuit section 6 and the sensitive circuit section 7. COPYRIGHT: (C)2005,JPO&NCIPI
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