| 摘要 |
<p>A Ge(alpha)-In(beta)-Sb(gamma)-Te(delta) alloy sputtering target for optical recording media characterized in that letting the sum of the respective composition ratios alpha, beta, gamma, delta (atom%) be 100, their ranges are 0.1<=alpha<=10, 0.1<=beta<=10, 60<=gamma<=90, 10<=delta<22. An optical recording medium made of the alloy is also disclosed. Few particles are produced during sputtering, and consequently a high-quality thin film is stably formed. The optical recording medium hardly causes an error of record bits and has a high recording density.</p> |
