LIGHT SOURCE DEVICE FOR EXTREME ULTRAVIOLET LITHOGRAPHY

摘要

PROBLEM TO BE SOLVED: To provide a light source device for extreme ultraviolet lithography which uses fine tin particles as a luminous material, and obtains high conversion efficiency by adjusting the density of the tin particles to the optimum value.

SOLUTION: The light source device for extreme ultraviolet lithography utilizing the light emitted from laser generating plasma uses a luminous material tape formed by applying a binder containing the fine particles of the luminous material at a prescribed rate to the base of a plastic film tape as a target for generating plasma by projecting laser light.

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