| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve a temperature uniformity of a gas shower head and a gas distribution below the gas shower head. <P>SOLUTION: A device for fixing the gas shower head 15, etc. to an electrode 11 in a plasma treatment apparatus comprises: a top electrode 11 which is formed of magnetic metal or ferromagnetic metal, or metal alloy and supplies high-frequency or DC power to generate a plasma inside a reaction container 10; the gas shower head 15 fixed to the top electrode; and a sheet-like magnetic assembly 22 which is bonded to the top face of the gas shower head 15 and consists of a plurality of divided magnets, a metal sheet made of ferromagnetic metal, and a deformed film. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
