| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus with which the enlargement of a machining size, the reducing of a machining tapered angle and the fixture of a center beam at the adjusting time for annular illumination can be realized. <P>SOLUTION: The laser beam machining apparatus comprises: an optical element, using a laser as a beam source, emitting the beam in a conical shape with the optical axis as the center axis to the beam flux emitted from the beam source; a lens disposed so that the position on the optical axis overlapping the beam flux becomes near an incident joint; and a lens for image-formation on the machining surface. In this case, the above optical element is a conical-shaped prism. Further, the lenses matching the overlapping position of the emitted beam to the incident joint, are constituted of at least two optical elements and have the structure separating the joints from the inner part and the surface of the lens, and in the case of changing the power of the lens, a relation between the incident joint and radiating beam flux is satisfied. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
