INSPECTION DEVICE USING ELECTRON BEAM

摘要

PROBLEM TO BE SOLVED: To provide an inspection device using an electron beam and capable of providing a stable inspection result by preventing degradation of inspection sensitivity by efficiently detecting an information signal.

SOLUTION: This inspection device is used for detecting a defect of a sample by generating an image from an information signal obtained by irradiating the sample with an electron beam. The inspection device is equipped with a lens control means for controlling excitation of a focusing lens and an objective lens so as to increase or decrease it when a negative voltage of a retarding voltage applied to the sample in order to decelerate the electron beam immediately before the sample is increased to the positive side or the negative side.

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