| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe for a probe card for measuring various electric characteristics of a semiconductor device such as an LSI chip. SOLUTION: In this probe for inspecting the semiconductor device, the probe has a hardness difference between a tip part and a barrel part, and is formed to make a hardness in the probe tip part higher than that of in a probe root part. COPYRIGHT: (C)2005,JPO&NCIPI
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