THREE-DIMENSIONAL MACHINING DEVICE AND METHOD USING BEAM IRRADIATION

摘要

PROBLEM TO BE SOLVED: To provide a three-dimensional machining device and method using beam irradiation which can machine the surface of an arbitrary material such as diamond highly precisely into a three-dimensional fine shape and are suitable for machining a die having a fine three-dimensional surface, a tool having a micro-diameter or the like. SOLUTION: This is a micro three-dimensional machining device for performing a removal process for a three-dimensional shape using an ion or an electron beam. The device is equipped with: a beam irradiation unit body; a plurality of secondary detectors that are arranged in two or more places near the beam of the beam irradiation unit and that measure the secondary ion or electron released from a machining point by the beam irradiation unit to transmit three-dimensional shape information of a machining surface; and a means for controlling a beam coordinate and beam staying time in the coordinate, on the basis of the measurement information of the machining shape from the plurality of secondary detectors. COPYRIGHT: (C)2005,JPO&NCIPI