发明名称 |
System and method of planar positioning |
摘要 |
A system and method of controlling the relationship between two surfaces (such as a primary surface and a reference surface) and correcting any deviation from the desired or ideal relationship generally employ a plurality of actuators and flexural assemblies. The actuators may be driven in unison to translate the primary surface in one-dimension; the actuators may also be driven independently, accommodating fine adjustment in pitch, roll, or both, of the primary surface. Flexural assemblies may be implemented to minimize lateral cross-coupling between the linear actuators.
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申请公布号 |
US2005011080(A1) |
申请公布日期 |
2005.01.20 |
申请号 |
US20040801925 |
申请日期 |
2004.03.15 |
申请人 |
GUNDERSON GARY M.;KRAFT RAYMOND H. |
发明人 |
GUNDERSON GARY M.;KRAFT RAYMOND H. |
分类号 |
G01B5/00;G01B21/24;G01D21/00;G01N21/95;G01R1/04;(IPC1-7):G01D21/00 |
主分类号 |
G01B5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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