| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of an optical waveguide with which a core layer having a cross sectional shape along a width direction is practically a circular shape is uniformly and highly precisely formed and a highly reliable optical waveguide is manufactured. SOLUTION: A recessed section 4, whose cross sectional shape along the width direction is practically semicircular, is formed in a second bottom section clad layer 3 to prepare a bottom section clad layer 1. A photosensitive resin 8 is filled into the recessed section 4. Then, the photosensitive resin 8 is exposed using a photomask 31 which is made of a gradation mask being formed in a symmetrical manner from the center along the width direction of the recessed section 4 and has optical transmissivity that is stepwise increased or decreased. By developing the exposed photosensitive resin 8, a core layer 5 whose width direction cross sectional shape is practically a circular shape is formed and a tip section clad layer 6 is formed to cover the core layer 5. COPYRIGHT: (C)2005,JPO&NCIPI |
