| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing an attracting and fixing apparatus wherein fixing, straightening, carrying, etc. can be performed without occurring of a bad condition such as occurrence of particles, and wherein the sticking quantity of the particles to a flat sample is extremely small. SOLUTION: In the method of manufacturing the attracting and fixing apparatus, sandblasting work is performed to the upper surface of a dielectric 31 to form a recessed and projecting surface consisting of projecting parts 34 and recess parts 33. Next, the top surfaces and side surfaces of the projecting parts 34 and the bottom surfaces 35 of the recessed parts 33 are simultaneously mirror-polished by a polishing method using abrasive grains and a brush to obtain an electrostatic chuck, where both of the top surfaces 24 and the side surfaces 25 of projecting parts 15 and the bottom surfaces 27 of recessed parts 26 are sufficiently mirror-polished. COPYRIGHT: (C)2005,JPO&NCIPI |
