| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspecting apparatus for a semiconductor device, for quickly and effectively radiating heat of a semiconductor device generating during a test, and for enabling correct test by keeping a test temperature constant without influence of the heat generating from the semiconductor device. SOLUTION: The inspecting apparatus for a semiconductor device for testing durability of the semiconductor device against a temperature, comprises: a match plate; and a contact module connected with the match plate, and having a radiating part radiating the heat generating from the semiconductor device to the outside and a test part for press-contact of lead wires of the semiconductor device. The radiating part has heat pipes. COPYRIGHT: (C)2005,JPO&NCIPI
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