| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a surface acoustic wave element capable of minimizing damages by etching, increasing the production yield of the surface acoustic wave element and also improving the reliability. SOLUTION: The manufacturing method comprises: an electrode forming step of forming an interdigital electrode 5 on the surface acoustic wave element part 2a formed on a wafer; a resist forming step of forming resist 19 at the surface acoustic wave element part 2a other than the vicinity of the interdigital electrode 5 and a reflector 6 and an opening part 12a which is a part of an excitation pad 12; a frequency measuring step of inputting excitation signals to the opening part 12a of the excitation pad 12 and measuring the frequency of the surface acoustic wave element part; a frequency adjusting step of adjusting the frequency of the surface acoustic wave element part 2a by etching; and a surface acoustic wave element separating step of cutting out the surface acoustic wave element part after frequency adjustment from the wafer and separating the surface acoustic wave element. COPYRIGHT: (C)2005,JPO&NCIPI
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