Thin film patterning method by optical lithography, e.g. for bio-chip manufacture, by forming evanescent sections in thin film to increase their solubility

摘要

To increase the solubility of a thin film (6), it is brought into contact with an optical element which guides visible or ultraviolet light (3) by means of total reflection or as a single mode, to form evanescent sections in the thin film. The evanescent sections penetrate the thin films, causing an increased solubility in the thin film, limited to the extent of the evanescent film. An independent claim is included for an apparatus for carrying out the method.