发明名称 PRESSURE SENSOR, LAMINATED PIEZOELECTRIC MATERIAL, AND MANUFACTURING METHOD THEREFOR
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a pressure sensor that has stable and reliable sensitivity, even under the environment where pressure varies greatly and mechanical vibration is large under high-temperature environment, and that has improved durability, can be manufactured easily, and can be made small. <P>SOLUTION: In the pressure sensor, a plurality of piezoelectric elements are laminated in the direction of the charge occurrence axis of a piezoelectric crystal, for forming an integrated block body by changing the polarity direction so that a junction surface has the same polarity. Then, a laminated piezoelectric material 30, for forming an electrode, where one end face and the other one in the direction of the stress application axis of the block body become positive and negative electrodes, respectively, is used. A diaphragm is formed at the rear of a diaphragm section 12a in one piece with a diaphragm section 12a for receiving the pressure from a body to be measured. Further, on a diaphragm head 12, having an electrode section 14, where the face of an end face abuts by surface contact with that of one-end face of the laminated piezoelectric material 30, an end face is formed. An electrode section 16, whose face abuts against the other end face of the laminated piezoelectric material 30, while being electrically insulated with respect to the body 10 and allows a lead pin 40 for detecting charges generated in the laminated piezoelectric body 30 to be connected, is provided at the rear side of the material 30. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p>
申请公布号 JP2005016984(A) 申请公布日期 2005.01.20
申请号 JP20030178589 申请日期 2003.06.23
申请人 CIMEO PRECISION CO LTD;EE II SYST KK 发明人 TAKAHASHI KAZUO;SOGA YOSHIHIKO;MISAIZU TAKESHI;HAYASHI TAKAYUKI;ENDO NAOYUKI;GASAN FUMIHIRO;SATSUTA HITOSHI;YOKOYAMA HIROSHI
分类号 G01L9/08;F02D45/00;G01L23/10;G01L23/22;H01L41/08;H01L41/083;H01L41/22;H01L41/23;H01L41/293 主分类号 G01L9/08
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