MASK PROTECTOR, MANUFACTURING METHOD OF MASK PROTECTOR AND MASK

摘要

PROBLEM TO BE SOLVED: To provide a mask protector or the like for which a through-hole is easily formed on a frame member without executing difficult work such as the work from the inner surface side of the frame member formed in a roughly rectangular shape or the like and the work of a corner part.

SOLUTION: In the mask protector PE comprising the frame member F whose one end part is provided on the periphery of a pattern formation area PA on a mask substrate P and a protective member C provided on the other end part of the frame member F for protecting the pattern formation area PA, communication grooves 1 and 2 for communicating the side of a space S formed by the frame member F and the protective member C and outdoor air are formed between the end face of the other end part and the protective member C.

COPYRIGHT: (C)2005,JPO&NCIPI