| 摘要 |
PROBLEM TO BE SOLVED: To minimize a movement of a dispense head, to enable a reduction in vibration at work and forming accurate pattern formation and to enable paste coating corresponding to a large-sizing of a planar display device without tremendously increasing the size of the paste coater. SOLUTION: A paste coater is composed of a frame, a fixed table provided on the upper surface of the frame, a movable stage in forward and backward directions on the upper part of the fixed table, a first linear motor driving the stage in forward and backward directions, a Y-axis arranged at both sides of the fixed table having length in forward and backward directions of the frame, a column arranged across between the both sides of Y-axis movable along the Y-axis, a second linear motor driving the column in Y-axis direction, a plurality of head units coating a substrate, mounted on the stage which is movable along the column, with paste in a longitudinal direction and in an orthogonal direction to the Y-axis, and a third linear motor driving each head unit in the orthogonal direction to the Y-axis. COPYRIGHT: (C)2005,JPO&NCIPI
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