| 摘要 |
A test apparatus, for testing electric properties of an integrated circuit, may include: a housing; a chuck on which an integrated circuit is placed as an object of the testing, the chuck being disposed in the housing; a tester part, having a probe needle, to test electric properties of the object, the tester part being attached to the housing; and a cleaning part to clean the probe needle, the cleaning part being disposed in the housing, and the cleaning part including a supporter, a mounting stand removably/attachably coupled to the supporter, and a polishing pad attached to the mounting stand to polish the probe needle.
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